JPS61202152A - 湿度検出装置 - Google Patents
湿度検出装置Info
- Publication number
- JPS61202152A JPS61202152A JP4338885A JP4338885A JPS61202152A JP S61202152 A JPS61202152 A JP S61202152A JP 4338885 A JP4338885 A JP 4338885A JP 4338885 A JP4338885 A JP 4338885A JP S61202152 A JPS61202152 A JP S61202152A
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- pellet
- diaphragm
- sensitive
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000008188 pellet Substances 0.000 claims abstract description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 10
- 239000010703 silicon Substances 0.000 claims abstract description 10
- 238000001514 detection method Methods 0.000 claims description 5
- 239000004677 Nylon Substances 0.000 abstract description 3
- 238000009792 diffusion process Methods 0.000 abstract description 3
- 229920001778 nylon Polymers 0.000 abstract description 3
- 229910001111 Fine metal Inorganic materials 0.000 abstract 1
- 238000011109 contamination Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 230000008602 contraction Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4338885A JPS61202152A (ja) | 1985-03-05 | 1985-03-05 | 湿度検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4338885A JPS61202152A (ja) | 1985-03-05 | 1985-03-05 | 湿度検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61202152A true JPS61202152A (ja) | 1986-09-06 |
| JPH0453252B2 JPH0453252B2 (en]) | 1992-08-26 |
Family
ID=12662414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4338885A Granted JPS61202152A (ja) | 1985-03-05 | 1985-03-05 | 湿度検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61202152A (en]) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6378049A (ja) * | 1986-09-19 | 1988-04-08 | Sanyo Electric Co Ltd | 湿度検出装置 |
| JPS63201561A (ja) * | 1987-02-18 | 1988-08-19 | Sanyo Electric Co Ltd | 湿度検出装置 |
| CN115523961A (zh) * | 2022-11-03 | 2022-12-27 | 南京元感微电子有限公司 | 一种气体与电容式压力传感器及其加工方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5028784U (en]) * | 1973-07-09 | 1975-04-02 | ||
| JPS5143980A (ja) * | 1974-10-14 | 1976-04-15 | Automobile Antipollution | Handotaihizumigeejishikiatsuryokusensa |
| JPS54158289A (en) * | 1978-06-05 | 1979-12-13 | Hitachi Ltd | Humidity detector |
-
1985
- 1985-03-05 JP JP4338885A patent/JPS61202152A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5028784U (en]) * | 1973-07-09 | 1975-04-02 | ||
| JPS5143980A (ja) * | 1974-10-14 | 1976-04-15 | Automobile Antipollution | Handotaihizumigeejishikiatsuryokusensa |
| JPS54158289A (en) * | 1978-06-05 | 1979-12-13 | Hitachi Ltd | Humidity detector |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6378049A (ja) * | 1986-09-19 | 1988-04-08 | Sanyo Electric Co Ltd | 湿度検出装置 |
| JPS63201561A (ja) * | 1987-02-18 | 1988-08-19 | Sanyo Electric Co Ltd | 湿度検出装置 |
| CN115523961A (zh) * | 2022-11-03 | 2022-12-27 | 南京元感微电子有限公司 | 一种气体与电容式压力传感器及其加工方法 |
| CN115523961B (zh) * | 2022-11-03 | 2023-02-28 | 南京元感微电子有限公司 | 一种气体与电容式压力传感器及其加工方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0453252B2 (en]) | 1992-08-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |